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多光谱带通线性渐变滤光片的研制
引用本文:陈焘,罗崇泰,刘宏开,周东平. 多光谱带通线性渐变滤光片的研制[J]. 光电工程, 2007, 34(7): 72-75
作者姓名:陈焘  罗崇泰  刘宏开  周东平
作者单位:兰州物理研究所表面工程技术国家重点实验室,甘肃,兰州,730000;上海欧菲尔光电有限公司,上海,200434
摘    要:线性渐变滤光片是一种特殊的滤光片,它的中心波长是随着在滤光片上位置的不同而变化的.采用离子束辅助沉积技术研制的线性渐变滤光片在0.4~1.1 μm波段有10通道,平均透射率从77.5%增加到97.4%,在基板的中间任一位置只透过0.4~1.1 μm内的一种特定波长的光.同时讨论了膜厚均匀性对线性渐变滤光片光谱性能的影响,计算表明镀制线性渐变滤光片时,在一定的配置下基片具有最佳的尺寸大小.

关 键 词:线性渐变滤光片  多光谱  膜厚均匀性
文章编号:1003-500X(2007)07-0072-04
收稿时间:2006-06-20
修稿时间:2006-06-202007-04-10

Development of multi-band linear variable filters
CHEN Tao,LUO Chong-tai,LIU Hong-kai,ZHOU Dong-ping. Development of multi-band linear variable filters[J]. Opto-Electronic Engineering, 2007, 34(7): 72-75
Authors:CHEN Tao  LUO Chong-tai  LIU Hong-kai  ZHOU Dong-ping
Affiliation:National Key of Surface Engineering, Lanzhou Institute of Physics, Lanzhou 730000, China; Shanghai Optofilm Opto-electronics Technilogy CO LTD, Shanghai 200434, China
Abstract:Linear variable filter is a special filter whose center wavelength varies with substrate. A linear variable filters with 10 channels cover the wavelength range from 0,4micron to 1.1micron, and average transmittance of 77.5%-97,4% was fabricated using ion-beam-assisted deposition techniques. Any special light of 0.4 - 1,1 micron is passed in any place of substrate, The influence of film thickness tmiformity on spectrum property of linear variable filters was discussed. The results show that substrate has optimum size when linear variable filters were fabricated in stated conditions.
Keywords:linear variable filters   multi-band   film thickness tmiformity
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