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Topographic intensity profiles in the scanning electron microscope—cubes
Authors:E P George  V N E Robinson
Abstract:Two-dimensional Monte Carlo computations have been used to predict the backscattered and secondary electron intensity profiles when a plane surface has a square of side d standing out from it. This was taken as a model for a gold cube of dimensions d situated on a thick gold substrate. This latter situation has been approximately reproduced experimentally and the predicted intensity profiles show quite good agreement with the observed intensity profiles for a range of values of the dimension d.
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