Modal analysis of a unimorph piezoelectrical transducer

Piezoelectric transducers are widely applied to MEMS devices as actuators or sensors due to their simple structure and easy control. A micromachined piezoelectric microjet is introduced and modal analysis of its piezoelectric actuator has been thoroughly presented. Both numerical analysis and experimental measurement are implemented in this study. In numerical analysis, an approximate method is established to evaluate the first vibration mode and finite-element methods are used to simulate higher order vibration modes of the transducer. An experimental system was also set up to measure the axisymmetric vibration modes of the transducer. Compared with experimental results, good correlation was found between the numerical and experimental results, which proved the validation and reliability of the models. Through these models, further optimal design of the transducer can be carried out.Financial support by National Natural Science Funds (29833070) and National 973 Basic Research Projects (G1999033106) of China is deeply appreciated.