| 光干涉法测量微机械零件变形的研究 |
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| 引用本文： | 田云辉,王世华,张涛,周肇飞. 光干涉法测量微机械零件变形的研究[J]. 光电工程, 2002, 29(5): 37-41 |
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| 作者姓名： | 田云辉 王世华 张涛 周肇飞 |
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| 作者单位： | 四川大学激光应用技术研究所,四川,成都,610065 |
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| 基金项目： | 国家自然科学基金资助项目(59575080) |
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| 摘 要： | 介绍了用光干涉法测量微加速度计零件变形的研究。将准直单色光投射入由一玻璃片和被测件之间形成的空气楔中，被测件表面和玻璃片底面反射的光发生干涉，由面阵CCD接收。用快速傅立叶变换（FFT）图像处理方法得到被测微悬臂梁的三维形变图。该方法可对微小器件的微位移作分辨办为10nm的测量，并直观的显示测量结果。
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| 关 键 词： | 光干涉法 变形测量 微加速度计 机械零部件 |
| 文章编号： | 1003-501X(2002)05-0037-05 |
| 收稿时间： | 2001-12-13 |
| 修稿时间： | 2001-12-13 |
Study on Micro-Deformation Measurement for Micro-Mechanical Parts with Optical Interferometry |
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| TIAN Yun-hui,WANG Shi-hua,ZHANG Tao,ZHOU Zhao-fei. Study on Micro-Deformation Measurement for Micro-Mechanical Parts with Optical Interferometry[J]. Opto-Electronic Engineering, 2002, 29(5): 37-41 |
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| Authors: | TIAN Yun-hui WANG Shi-hua ZHANG Tao ZHOU Zhao-fei |
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| Abstract: | A study on measurement of deformation micro-accelerometer parts with optical interferometry is presented. The collimated monochromatic light is projected into an air wedge formed between glass plate and measured part. Interference produced between the measured part surface and the light reflected by the bottom of glass plate is received by planar array CCD. 3D deformation pattern of the measured micro-cantilever beam is processed with fast Fourier transform. The micro-deformation of the micro-device can be measured by this method with accuracy of 10nm and the measured results can be displayed directly. |
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| Keywords: | Deformation measurement Optical interferometry Micro-accelerometer Mechanical parts and elements |
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