| 变温腐蚀法制备纳米光纤探针 |
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| 引用本文： | 杨修文,祝生祥,胡毅. 变温腐蚀法制备纳米光纤探针[J]. 微纳电子技术, 2008, 45(4): 231-234 |
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| 作者姓名： | 杨修文 祝生祥 胡毅 |
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| 作者单位： | 1. 郧阳师范高等专科学校物理系,湖北,丹江口,442700
2. 同济大学Pohl固体物理研究所,上海,200092 |
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| 基金项目： | 国家自然科学基金 , 湖北省高校教学研究项目 |
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| 摘 要： | 通过改变温度,用腐蚀的方法制备出用于近场光学显微镜的光纤探针。通过控制光纤在不同温度的腐蚀液中腐蚀的时间,制备出多种形貌的光纤探针,所制作探针的锥形过渡区短而锥角大。该法具有重复性高、探针形貌可控、操作方便、实验费用低廉、制备的探针表面光滑等优点,利用该方法成功地制备出针尖尺寸50～300nm、针尖锥角在40°～74°可调的光纤探针。将制备的探针用于扫描全息光栅(500线/mm),结果在40mm范围内扫描有20个周期,与全息光栅的标定结果相符。
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| 关 键 词： | 纳米光纤探针 近场光学 显微镜 腐蚀法 温度 |
Fabrication of Nanometric Optical Fiber Probe by Etching Method Through Changing Temperature |
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| Yang Xiuwen,Zhu Shengxiang,Hu Yi. Fabrication of Nanometric Optical Fiber Probe by Etching Method Through Changing Temperature[J]. Micronanoelectronic Technology, 2008, 45(4): 231-234 |
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| Authors: | Yang Xiuwen Zhu Shengxiang Hu Yi |
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| Abstract: | The nanometric optical fiber probes used in near-field optical microscopy, were fabricated by etching method through changing the temperature. Probes with various shapes were fabricated, the taper length and taper angle of the probe could be efficiently controlled through adjusting the etching time in the corrosive liquid with different temperature. This method has the advantages such as high reproducibility, controllability, convenience, lower cost, and it can make the probe surface smooth. Probes with 50-... |
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| Keywords: | nanometric optical fiber probe near-field optics microscope etching method temperature |
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