Point defects induced in ion irradiated 4H–SiC probed by exciton lines

The defects produced in 4H–SiC epitaxial layers by irradiation with a 200 keV H⁺ ion beam in the fluence range 6.5 × 10¹¹–1.8 × 10¹³ ions/cm² are investigated by Low Temperature Photoluminescence (LTPL–40 K).The defects produced by ion beam irradiation induce the formation of some sharp lines called “alphabet lines” in the photoluminescence spectra in the 425–443 nm range, due to the recombination of excitons at structural defects.From the LTPL lines intensity trend, as function of proton fluence, it is possible to single out two groups of peaks: the P₁ lines (e, f, g) and the P₂ lines (a, b, c, d) that exhibit different trends with the ion fluence. The P₁ group normalized yield increases with ion fluence, reaches a maximum at 2.5 × 10¹² ions/cm² and then decreases. The P₂ group normalized yield, instead, exhibits a formation threshold at low fluence, then increases until a maximum value at a fluence of 3.5 × 10¹² ions/cm² and decreases at higher fluence, reaching a value of 50% of the maximum yield.The behaviour of P₁ and P₂ lines, with ion fluence, indicates a production of point defects at low fluence, followed by a subsequent local rearrangement creating complex defects at high fluence.