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Novel transparent hybrid polymer working stamp for UV-imprinting |
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| Authors: | Anna Klukowska Anett Kolander Iris Bergmair Michael Mühlberger Hannes Leichtfried Freimut Reuther Gabi Grützner Rainer Schöftner |
| Affiliation: | 1. University of Wuppertal, Wuppertal D-42119, Germany;2. Leibniz Institute for Surface Modification, Leipzig, D-04318, Germany;1. Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany;2. Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany;3. NanoImprint Konsortium Hessen (NIH), Heinrich-Plett-Str. 40, 34132 Kassel, Germany |
| Abstract: | Transparent stamps are an integral and crucial part of the UV-imprinting. Time consuming fabrication of quartz stamps increases the price of the technology. In the presented work a thermally stable transparent imprint stamp made of a novel hybrid polymer system is demonstrated. As a low-cost and highly efficient alternative the hybrid polymer stamp contributes to the acceptance and application of the nanoimprint technology. By using the UV-patternable inorganic–organic hybrid polymer quartz stamps might become superfluous in the UV-imprint process entirely, because transparent working stamps can be manufactured also with use of opaque silicon master stamps. |
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