Y型声表面波质量传感器

报道了在 12 8°Y切割X传播方向的LiNbO3基片上设计并研制的中心频率为 12 2MHz的Y型双声路质量传感器 ,它具有一个参考声路臂和一个测量声路臂 ,每声路中有一个采用光刻工艺精确定位的质量沉积区。本文阐述了质量沉积效应的原理、器件的设计方法。采用振荡的方式对器件的性能进行测试。测试结果表明 :该器件的两声路频谱对称性良好 ,并且有良好的相对温度系数 ,仅为 12Hz/℃左右。器件的质量沉积效应灵敏度约为 3 6GHz·cm2 /g ,并且具有良好的线性度

Y-Type Surface Acoustic Wave Mass Sensor

A new Y??type SAW mass sensor with center frequency 122 MHz fabricated on a substrate of LiNbO3 ( 128??Yand X??propagating) is reported. This sensor has one acoustic path for reference and another acoustic path for measure??ment. There is a mass loading area located accurately in each acoustic path and fabricated by photolithography technolo??gy.The theory of mass??loading effect and design rules of the device have been explained. The device has been tested bymode of oscillation. The results show that the Y??type mass sensor has a good symmetry between frequency responses ofeach path and a very low relative temperature coefficient ( only about 12 Hz/ ) . Mass loading effect sensit ivity is about3??6 GHz!cm2 / g with a good linearity.