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Novel on-chip fully monolithic integration of GaAs devices with completely fabricated Si CMOS circuits
Authors:Kai Ma Chen   R. Miller   D.A.B. Harris   J.S.   Jr.
Affiliation:Solid State & Photonics Lab., Stanford Univ., CA, USA;
Abstract:We monolithically integrated polycrystalline GaAs metal-semiconductor-metal (MSM) photoconductive switches with a completely fabricated Si-CMOS amplifier and obtained a properly functional optical receiver, without altering the Si circuit performance. To our knowledge, this is the first time a fully monolithic on-chip integration has been achieved.
Keywords:
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