Novel on-chip fully monolithic integration of GaAs devices with completely fabricated Si CMOS circuits |
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Authors: | Kai Ma Chen R. Miller D.A.B. Harris J.S. Jr. |
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Affiliation: | Solid State & Photonics Lab., Stanford Univ., CA, USA; |
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Abstract: | We monolithically integrated polycrystalline GaAs metal-semiconductor-metal (MSM) photoconductive switches with a completely fabricated Si-CMOS amplifier and obtained a properly functional optical receiver, without altering the Si circuit performance. To our knowledge, this is the first time a fully monolithic on-chip integration has been achieved. |
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