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超磁致伸缩微位移驱动器的研究
引用本文:贾宇辉,谭久彬,张杰.超磁致伸缩微位移驱动器的研究[J].微细加工技术,2000(2):70-74.
作者姓名:贾宇辉  谭久彬  张杰
作者单位:哈尔滨工业大学自动化测试与控制系,哈尔滨,150001
摘    要:新型超磁致伸缩材料TbDyFe具有输出力大、位移分辨力高及位移范围大等特点,将其应用于微位移驱动器中,将极大提高驱动器的性能指标,从而推动超精加工技术的发展。文中介绍了应用超磁伸缩材料研制的驱动器的结构及性能,并建立磁-机械耦合西式,以利于超磁致伸缩器件的研究及设计。

关 键 词:超磁致伸缩  微位移驱动器  磁-机械耦合  VLSI
文章编号:1003-8213(2000)02-0014-06
修稿时间:1999-08-16

Study on micro-displacement Actuator of Giant Magnetostriction
JIA Yu-hui,TAN Jiu-bin,ZHANG Jie.Study on micro-displacement Actuator of Giant Magnetostriction[J].Microfabrication Technology,2000(2):70-74.
Authors:JIA Yu-hui  TAN Jiu-bin  ZHANG Jie
Affiliation:JIA Yu-hui ,TAN Jiu-bin , ZHANG Jie ;(Department of automated test measurement and control Harbin Institute of Technology, Harbin 150001, Chiha)
Abstract:The new giant magnetostrictive material TbDyFe has the trait of large output power high displacement resolution and great displacement range.If the material is used in the micro?displacement actuator,the performance index of displacement actuator will be greatly increased.It will impel the development of giant precision processing technique.The structure and the performance of giant magnetostrictive actuator are introduced and the model of magnet?machine coupling is proposed.It will be propitious to the study and design of the giant magnetostrictive devices.
Keywords:giant magnetostrictive  micro-displacement actuator  magnet-machine coupling  Finite Element
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