Replication of nanostructures on microstructures by intermediate film mold inserted hot embossing process

The present study proposes a simple method to replicate nano/micro combined multiscale structures using an intermediate film mold and anodic aluminum oxide (AAO) nanomold in hot embossing process. The proposed method is simply to add an intermediate film mold with microscale thru-hole patterns to the ordinary mold system, on which nanostructures are patterned, in the hot embossing process. The intermediate film mold is inserted between polymer substrate and AAO nanomold. During the hot embossing process, the polymer first fills microscale thru-hole patterns in the intermediate film mold and subsequently fills nanopores in AAO nanomold, resulting in the nano/micro combined structures. The intermediate film molds, which have microscale thru-hole patterns were fabricated by micro-milling, laser ablation, etching methods and/or LIGA process. The nano/micro combined structures were successfully replicated by the proposed method.