Laser interferometer system for metrology and machine tool applications |
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| Authors: | LJ Wuerz RC Quenelle |
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| Affiliation: | 1. Hewlett-Packard Company, 5301 Stevens Creek Blvd., Santa Clara, CA 95050, USA |
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| Abstract: | This paper describes a recently introduced laser measurement system based on a new HeNe laser tube. Design principles of laser tube cavity length control, frequency stability measurements, and the limits to measurement resolution extension will be discussed. |
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| Keywords: | Interferometers linear measurement lasers machine-tool control |
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