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Hydrogen gettering of titaniumpalladium/palladium nanocomposite films synthesized by cosputtering and vacuum-annealing
Authors:Hyo-Ryoung Lim  Nu Si A Eom  Jeong-Ho Cho  Hong-Baek Cho  Yong-Ho Choa
Affiliation:1. Department of Fusion Chemical Engineering, Hanyang University, Ansan 15588, Republic of Korea;2. Department of Korea Institute for Rare Metals, Korea Institute of Industrial Technology, Incheon 21999, Republic of Korea;3. Electronic Components Center, Korea Institute of Ceramic Engineering and Technology, Jinju, 52851, Republic of Korea;4. Department of Materials Science and Chemical Engineering, Hanyang University, Ansan 15588, Republic of Korea
Abstract:Nano-engineered composite film, prepared by the combination of titanium (Ti) nanoparticles with surrounding layers of palladium (Pd), has been suggested as a high performance hydrogen (H2) getter. Uniform Ti/>Pd film covered by a 35-nm-thick Pd layer was deposited on a silicon wafer <em>via</em> cosputtering and post-vacuum-annealing. As the annealing temperature increased from 200 to 400 °C, amorphous alloy and nano-aggregates were observed, and efficient structural modulation occurred at 400 °C, where dewetting of Pd cover layer from the getter surface was observed. This led to the enhancement of the chemisorption capacity of the 400<sup>o</sup>C-annealed sample, two-times higher than that of the 300<sup>o</sup>C-annealed sample. Abrupt change in residual gases, which typically come from a bonding process, can be mitigated by minimizing the gas transfer distance through the dewetting of the cover layer; since Ti nanoparticles surrounded by Pd exist independently of each other in the gettering layer, external H<sub>2</sub> gas molecules can be continuously adsorbed onto still-unreacted Ti particles by passing through the dewetted channels in the Pd cover layer. This concept demonstrates a pathway towards a useful synthetic approach for high-performance thin-film getters with high adsorption capacity, fast gettering rate and good device compatibility.</td> </tr> <tr> <td align=
Keywords:Hydrogen  Getter  Titanium-palladium  Composite film  Multilayer
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