| 离子束溅射法制备YBa_2Cu_3O_(7-x)超导薄膜 |
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| 引用本文： | 胡倾宇,闻立时,赵航炜,乔桂文钱声伟,于宝海,杨巧勤,庄育智.离子束溅射法制备YBa_2Cu_3O_(7-x)超导薄膜[J].材料研究学报,1989,3(3):233-236. |
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| 作者姓名： | 胡倾宇 闻立时 赵航炜 乔桂文钱声伟 于宝海 杨巧勤 庄育智 |
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| 作者单位： | 中国科学院金属研究所
(胡倾宇，闻立时，赵航炜，乔桂文钱声伟，于宝海，杨巧勤)，中国科学院金属研究所(庄育智) |
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| 摘 要： | 采用 YBa_2Cu_3O_(7-x)靶材,用离子束溅射法在多种衬底上得到了接近化学计量的YBa_2Cu_3O_(7-x)单相超导薄膜。
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| 关 键 词： | 超导薄膜 离子束溅射法 |
| 收稿时间： | 1989-06-25 |
| 修稿时间： | 1989-06-25 |
PREPARATION OF YBa_2Cu_3O_(7-x) SUPER-CONDUCTOR THIN FILM BY ION BEAM SPUTTERING |
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| HU Qingyu WEN Lishi ZHAO Hangwei QIAO Guiwen QIAN Shengwei YU Baohai YANG Qiaoqin ZHUANG Yuzhi.PREPARATION OF YBa_2Cu_3O_(7-x) SUPER-CONDUCTOR THIN FILM BY ION BEAM SPUTTERING[J].Chinese Journal of Materials Research,1989,3(3):233-236. |
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| Authors: | HU Qingyu WEN Lishi ZHAO Hangwei QIAO Guiwen QIAN Shengwei YU Baohai YANG Qiaoqin ZHUANG Yuzhi |
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| Affiliation: | HU Qingyu WEN Lishi ZHAO Hangwei QIAO Guiwen QIAN Shengwei YU Baohai YANG Qiaoqin ZHUANG Yuzhi (Institute of Metal Research,Academia Sinica) |
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| Abstract: | A preliminary investigation of Y-Ba-Cu-O superconductorthin films deposited on different substrate by ion beam sputtering was reported.The experimental results show that this method provides a bette wayto obtain stoichiometric YBa_2Cu_3O_(7-x) superconductor thin film by physicalvapor deposition. |
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| Keywords: | superconductor f(?)lml (?)on beam sputting |
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