| Diffusion of Zinc in In_xGa_(1-x)As, InP and GaAs |
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| 作者单位： | Institute of Semiconductors，Academia Sinica，Beijing 100083，CHN |
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| 摘 要： | ＤｉｆｆｕｓｉｏｎｏｆＺｉｎｃｉｎＩｎ_ｘＧａ_（１－ｘ）Ａｓ，ＩｎＰａｎｄＧａＡｓ￥ＺＨＵＡＮＧＷａｎｒｕ；ＺＯＵＺｈｅｎｇｚｈｏｎｇ；ＷＡＮＧＦｅｎｇ；ＳＵＮＦｕｒｏｎｇ（ＩｎｓｔｉｔｕｔｅｏｆＳｅｍｉｃｏｎｄｕｃｔｏｒｓ，ＡｃａｄｅｍｉａＳｉｎｉ...
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Diffusion of Zinc in In_xGa_(1-x)As, InP and GaAs |
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| ZHUANG Wanru,ZOU Zhengzhong,WANG Feng,SUN Furong. Diffusion of Zinc in In_xGa_(1-x)As, InP and GaAs[J]. Semiconductor Photonics and Technology, 1996, 0(1) |
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| Authors: | ZHUANG Wanru ZOU Zhengzhong WANG Feng SUN Furong |
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| Abstract: | |
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| Keywords: | OEIC Integrated Optics Semiconductor Device Technology Diffusion |
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