|
|||||
|
|
Dynamics and temperature dependence of etching processes of porous and barrier aluminum oxide layers |
|
| Authors: | Dmitri A Brevnov |
| Affiliation: | Department of Chemical and Nuclear Engineering, Center for Micro-Engineered Materials, The University of New Mexico, Albuquerque, NM 87131, USA |
| Abstract: | |
| Keywords: | Anodic aluminum oxide Barrier oxide layer Impedance spectroscopy Spectroscopic ellipsometry |
| 本文献已被 ScienceDirect 等数据库收录！ | |