Knowledge acquisition from batch semiconductor manufacturing data |
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| Affiliation: | 1. Qinghai Provincial Key Laboratory of New Light Alloys, Qinghai Provincial Engineering Research Center of High Performance Light Metal Alloys and Forming, Qinghai University, Xining 810016, China;2. College of Materials Science and Engineering, Shenyang University of Technology, Shenyang 110870, China;1. Phototherapy Unit, Dermatology Department, Faculty of Medicine, Cairo University, Egypt;2. Department of Dermatology, College of Medicine, Kaohsiung Medical University Hospital, Kaohsiung Medical University, No 100, Tzyou 1st Road, Kaohsiung 807, Taiwan;1. Baruch Institute of Coastal Ecology and Forest Science, Clemson University, Georgetown, SC, 29442, United States;2. Department of Biogeochemical Processes, Max Planck Institute for Biogeochemistry, Jena, 07745, Germany;3. Water Management & Hydrological Science, Texas A&M University, College Station, TX, 77843, United States;4. Key Lab of Silviculture, School of Forestry and Landscape Architecture, Anhui Agricultural University, Hefei, Anhui Province, 230061, China;5. Department of Environmental Engineering and Earth Science, Clemson University, South Carolina, 29634, United States |
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| Abstract: | Semiconductor manufacturing data consist of the processes and the machines involved in the production of batches of semiconductor circuit wafers. Wafer quality depends on the manufacturing line status and it is measured at the end of the line. We have developed a knowledge discovery system that is intended to help the yield analysis expert by learning the tentative causes of low quality wafers from an exhaustive amount of manufacturing data. The yield analysis expert, by using the knowledge discovered, will decide on which corrective actions to perform on the manufacturing process. This paper discusses the transformations carried out within the data from raw data to discovered knowledge, and also the two main tasks performed by the system. The features of the inductive algorithm performing those tasks are also described. Yield analysis experts at Lucent Technologies, Bell Labs Innovations in Spain are currently using this knowledge discovery application. |
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