W-C-S-Mo复合薄膜的制备及力学和摩擦学性能

利用磁控溅射与磁过滤阴极真空电弧（MS/FCVA）复合沉积法，在不同偏压下在单晶Si基体上制备W-C-S-Mo四元复合薄膜；分析沉积偏压对薄膜纳米硬度、弹性模量和膜基结合力等力学性能的影响；在潮湿大气、真空环境下研究偏压对薄膜摩擦学性能的影响。结果表明，薄膜硬度、弹性模量和附着力随着沉积负偏压的增大呈现先增大后减小的趋势，在偏压-100 V时薄膜力学性能最好；负偏压-100 V下制备的W-C-S-Mo四元复合薄膜样品在潮湿大气和真空环境下均具有较好的摩擦学性能，拉曼测试发现，W-C-S-Mo复合薄膜在潮湿大气环境中的润滑作用主要由DLC提供，而在真空环境中薄膜中的软质相MoS2晶粒起润滑作用。

Preparation and Mechanical and Tribological Properties of W-C-S-Mo Composite Films

The composite films including four component W-C-S-Mo different bias substrate voltage were deposited on Si substrate by a hybrid of magnetron sputtering and DC filtered cathodic vacuum arc (MS/FCVA) technology.Impacts of bias substrate voltage on mechanical properties as hardness,elastic modulus and adhesion force of these different nano-films were analyzed by nano-hardness tester and nano-scratch tester,and impacts of bias substrate voltage on tribological properties in different environments ranging from humid air to vacuum of space were studied by CSM ball-on-disk tester.The results show that hardness,elastic modulus and adhesion force of the film is tend to increase first and then decrease along with increasing of the bias substrate voltage,and the films under substrate bias voltage of -100 V have the best mechanical properties.The W-C-S-Mo films prepared under -100 V bias voltage have excellent tribological properties in both humid air and vacuum environment.Raman test results show that the lubrication of W-C-S-Mo films is significantly supported by DLC in humid air environment,furthermore,the MoS2 crystal particles in soft phases of the film have lubrication function in vacuum environment.