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Absorption of acrylates and polysilazanes in the far UVC and the VUV regions |
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| Authors: | Lutz Prager Luise WennrichWolfgang Knolle Sergej NaumovAndrea Prager |
| Affiliation: | Leibniz-Institut für Oberflächenmodifizierung e.V. (IOM), Chemical Department, Permoserstr. 15, D-04318 Leipzig, Germany |
| Abstract: | A simple but reliable method was developed for the determination of wavelength-dependent absorption coefficients in the vacuum-UV (VUV) spectral range 160 nm < λ < 195 nm. |
| Keywords: | Thin films Polymers XPS Optical properties |
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