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Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films |
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| Authors: | S. Firstov V. Kulikovsky T. Rogul R. Ctvrtlik |
| Affiliation: | 1. Institute for Problems of Materials Science, Academy of Sciences of Ukraine, 3 Krzhyzhanovsky St., 03142 Kiev, Ukraine;2. Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21 Prague 8, Czech Republic;3. Joint Laboratory of Optics of Palacky University and Institute of Physics of Academy of Sciences of the Czech Republic, v.v.i., 17. listopadu 50, 772 07 Olomouc, Czech Republic |
| Abstract: | The results of a study of small additions of oxygen and nitrogen on the structure and mechanical properties of nanocrystalline titanium films obtained by magnetron sputtering are presented. |
| Keywords: | Nanocrystalline Ti films Sputtering Hardness Elastic modulus Gas impurities |
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