Phase transformations in face centered cubic (Al0.32Cr0.68)2O3 thin films |
| |
Authors: | Ali Khatibi Jun LuJens Jensen Per EklundLars Hultman |
| |
Affiliation: | Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, S-581 83 Linköping, Sweden |
| |
Abstract: | Face centered cubic (Al0.32Cr0.68)2O3 thin films have been annealed in the temperature range of 500–1000 °C during 2–8 h. The fcc structure of the film remains intact when annealed at temperatures up to 700 °C for 8 h. X-ray diffraction and transmission electron microscopy show the onset of phase transformation to corundum phase alloys in the sample annealed at 900 °C for 2 h, where annealing at 1000 °C for 2 h results in complete phase transformation to α-(Al0.32Cr0.68)2O3. In-plane and out-of-plane line scans performed in EDX TEM and θ/2θ XRD patterns did not show any phase separation into α-Cr2O3 and Al2O3 prior and after the annealing. The apparent activation energy of this process is 380–480 kJ/mol as determined by the Johnson–Mehl–Avrami model. |
| |
Keywords: | fcc Al&ndash Cr&ndash O alloys Phase transformation kinetics Corundum solid solution Annealing |
本文献已被 ScienceDirect 等数据库收录! |