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Low resistance ohmic contacts to amorphous IGZO thin films by hydrogen plasma treatment |
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| Authors: | Su-Hwan Yang Jun Young Kim Min Joo Park Kwang-Hyuk Choi Joon Seop Kwak Han-Ki Kim Ji-Myon Lee |
| Affiliation: | 1. Department of Materials Science and Metallurgical Engineering, Sunchon National University, Sunchon, Chonnam 540‐742, South Korea;2. Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyonggi-do 446‐701, South Korea |
| Abstract: | |
| Keywords: | Amorphous IGZO Ohmic contact Hydrogen plasma treatment |
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