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Minimizing scanning electron microscope artefacts by filter design
Authors:M Aronsson  Ö Savborg  & G Borgefors
Affiliation:Centre for Image Analysis, Lägerhyddvägen 17, 752 37 Uppsala, Sweden, StoraEnso Research, Södra Mariegatan 18, 791 80 Falun, Sweden
Abstract:A new type of non‐linear filter for digital images has been developed. By using distance transforms we estimate the average point spread function for a set of fibre cross‐sectional images. Then a fast filter technique, based on lookup tables for distance layers, attenuates the uneven background response from the scanning electron microscope. Compared to the convolution‐based techniques that we tried, this approach caused less blurring effects on our fibre images and also made the background pixels more homogeneous. The only assumption we make is that we can roughly segment the background pixels by using a pixel‐wise classifier. Although the assumption that the uneven background response can be described by a circular point spread function is only approximately true in the case discussed here, this method greatly attenuates the effect and provides a fast and general filtering method that can also be of use for other applications.
Keywords:Distance transform  filter  point spread function  scanning electron microscope
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