三维瞬态激光烧蚀聚合物微流道动态界面研究

相恒富，傅建中，陈子辰相恒富，傅建中，陈子辰为了预测热加工过程中的流道轮廓和烧蚀面温度场，基于CO2激光直写聚合物微流体芯片加工原理以及传热学原理和能量平衡原理，建立了三维瞬态激光烧蚀模型.通过有限元方法和伽辽金变换得到有限元矩阵方程，利用单元生死技术和高精度数值算法模拟了烧蚀过程的材料损失，并给出了三维瞬态动态烧蚀界面和温度场随时间和空间的变化关系.以聚甲基丙烯酸甲酯（PMMA）为例，给出了在不同时刻的数值算例，实验得到的流道深度与模拟结果吻合.仿真结果表明采用该方法预测流道轮廓和温度场是可行的.

Dynamic interface for three-dimensional transient laser ablation polymer microchannels

Based on the machining principle of CO2 laser direct-writing polymer microfluidic chip,as well as the theory of heat conduction and energy conservation,a three-dimensional transient laser ablation model was built to predict the groove shape and ablation front temperature field in the thermal process.A finite element matrix equation was built by finite element method and Galerkin transformation.Element birth and death technology and high precision numerical arithmetic were applied to model the material removal in the ablation process.Then the three-dimensional transient dynamic ablation interface and the temperature field varying with time and space were obtained.Several numerical results at different time point were presented using polydimethylsiloxane(PMMA) as an example. Agreement of the simulated results of groove depth with the experimental data validated the effectiveness of the proposed method for predicting the groove contour and temperature field.