Manufacturing and Macroscopic Properties of Cold Sprayed Cu-In Coating Material for Sputtering Target |
| |
Authors: | Young-Min Jin Jin-Hyeon Cho Dong-Yong Park Ju-Ho Kim Kee-Ahn Lee |
| |
Affiliation: | (1) School of Advanced Materials Engineering, Andong National University, Andong, 760-749, Korea;(2) Tae-Kwang Tech, Gyungju, 780-874, Korea; |
| |
Abstract: | This study attempted to manufacture a Cu-In coating layer via the cold spray process and to investigate the applicability
of the layer as a sputtering target material. In addition, changes made to the microstructure and properties of the layer
due to annealing heat treatment were evaluated, compared, and analyzed. To examine the microstructural and property changes
made to the Cu-In coating layer and Cu coating layer (comparison material), ICP, XRD, SEM, and other tests were conducted;
purity, density, hardness, porosity, and bond-strength were measured. The results showed that coating layers with thickness
of 20 mm (Cu) and 810 μm (Cu-In) could be manufactured via cold spraying under optimal process conditions. With the Cu-In
coating layer, the pure Cu and intermetallic compounds of Cu7In3 and CuIn4 were found to exist inside the layer regardless of annealing heat treatment. The preannealing inconsistent microstructure
of the layer, whose phases were difficult to distinguish was found to have transformed into one with clearer phase distinction
and fine, consistent grains following thermal treatment via a progress of recovery, recrystallization, and grain growth. The
porosity and hardness values of the coating layers were 1.4% and 133.9 HV, respectively, for Cu and 3.54% and 476.6 HV, respectively,
for Cu-In. The values of the Cu-In layer were higher than those of the Cu layer in terms of porosity and hardness, which declined
drastically after annealing. With the porosity of the Cu-In coating layer in particular, the higher value found during the
preannealing stage dropped to 0.36% after heat treatment of 773 K/1 h as the level on a par with pure Cu (0.44%), thus indicating
the improved quality of the Cu-In layer. Moreover, the results of the bond-strength measurement performed on the Cu-In coating
layer and annealing treated materials revealed the strength to be relatively high for heat treated coating layers. Based on
the findings of this study and on the comparison and discussion of the properties that are typically required of the target
material, the Cu-In coating layer manufactured via cold spray process and annealing heat treatment can be said to be applicable
as sputtering target in the future. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|