新颖的微空心阴极放电及其性质研究

介绍了微空心阴极放电(microhollow cathode discharge,简称MHCD)的特点,根据MHCD的基本结构设计了—种新的放电结构:它由一个电源和一个可变电阻器构成“微空心阴极维持的辉光放电”,MHCD作为放电的阴极,金属针作为放电的阳极。利用该放电结构进行了空气的放电实验,产生了高气压大体积高电流密度的辉光放电等离子体,用于工业上的多种等离子体加工中;如果用稀有气体放电则能够用来作为微型准分子激光器的增益介质。在200Torr气压下,获得了稳定的空气直流放电,等离子体中电子密度估计在1011到1012cm-3之间,测得放电电流范围;8mA-30mA。测得放电V-I特性曲线,它有典型的微空心阴极维持的辉光放电的特点.估计的气体放电温度为2000K左右。

Study on a novel microhollow cathode discharge and the discharge properties

The characteristic of microhollow cathode discharge(MHCD) is introduced.A new discharge device is designed on the base of the configuration of MHCD.It only uses an electrical source and a rheostat to fabricate microhollow cathode sustained glow discharge.MHCD is used the discharge cathode,the metal needle is the discharge anode.The discharge experiment is carried through the designed device with the air,the high-pressure large-volume high-current density glow plasmas are formed,which can be used in the multi-plasma-process in the industry.If the discharge gas is rare gas,it will use the media of the excimer laser.The stabilization air direct current is gained at 200Torr,and the electron density of the plasmas is estimated between 10~(11)cm~(-3).and 10~(12)cm~(-3).The discharge current can change from 8mA to 30mA.The characteristic curve of the discharge is measured,which is the typical curve of microhollow cathode sustained glow discharge(MCSD).The gas temperature is estimated with 2000K.