| 类金刚石碳膜作为红外元件减反射膜的研究 |
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| 引用本文： | 毛友德,刘声雷.类金刚石碳膜作为红外元件减反射膜的研究[J].半导体光电,1991,12(2):164-167,175. |
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| 作者姓名： | 毛友德 刘声雷 |
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| 作者单位： | 合肥工业大学应用物理系，合肥工业大学应用物理系，合肥工业大学应用物理系 合肥 230009，合肥 230009，合肥 230009 |
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| 摘 要： | 本文以甲苯为工作气体,先用高频辉光放电等离子体CVD方法制备出类金刚石碳膜,研究了它的光吸收和红外增透性,以及在Si、Ge等红外元件上作为减反射膜的应用。
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| 关 键 词： | 类金刚石 碳膜 红外器件 反射膜 |
Study on Diamond--like Carhon Film for Antireflection Coating of Infrared Devices |
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| Mao Youde,Liu Shenglei,Yang Guowei Dept. of Applied Physics,Hefei Polytechnic University Hefei.Study on Diamond--like Carhon Film for Antireflection Coating of Infrared Devices[J].Semiconductor Optoelectronics,1991,12(2):164-167,175. |
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| Authors: | Mao Youde Liu Shenglei Yang Guowei Dept of Applied Physics Hefei Polytechnic University Hefei |
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| Affiliation: | Mao Youde,Liu Shenglei,Yang Guowei Dept. of Applied Physics,Hefei Polytechnic University Hefei 230009 |
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| Abstract: | Diamond-like Carbon films have been formed from C_7H_8 gas by rfPCVD. The optical properties of diamond-like carbon films are investigaed. The experiment results show that diamond-like carbon films are suitable for antireflec- tion coatings of infrared devices. |
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| Keywords: | rfPCVD Diamond-like Carbon Film Antireflection Coating |
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