环氧树脂高压平面固体开关研究

本研究首先使用Maxwell仿真软件对环氧树脂固体开关的可行性进行分析,然后利用微电子机械加工技术,使用环氧树脂作为开关的固体材料制得固体开关。对环氧树脂固体材料的热稳定性,以及开关的静态自由击穿电压、开关延迟时间进行测试,并对触发后的空气开关与固体开关形貌进行对比。结果表明:环氧树脂可以承受300℃的高温;在主电极和触发电极距离0.08mm、触发电压2 000V条件下,高压固体开关可被触发;相同尺寸的固体开关比空气开关耐压400~600V,开关延迟时间约20ns;触发后的固体开关损伤严重,不能重复使用。

The Research on Epoxy Resin High-voltage Planar Switch

The solid high-voltage switch was prepared by MEMS (Micro-electromechanical Systems) methods, and using epoxy resin as solid meterial. The feasibility of the epoxy resin high-voltage planar switch was simulated by Maxwell, meanwhile, the thermal stability of epoxy resin, the static self-breakdown voltage of high-voltage switch in different size, as well as the delay time were tested. Finally, the features of switch were compared before and after sealing. The results showed that the epoxy resin can resist the temperature of 300℃, the solid high-voltage switch can be triggered, under the conditions of 0.08mm distance between negative electrode and trigger electrode and 2 000V voltage, the solid high-voltage switch can resist 400~600V more than that of air high-voltage switch with same size, and the delay time is about 20ns, while the feature of solid high-voltage switch was damaged heavily after trigger, which can’t be reused.