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两种莫尔条纹信号对光栅系统测量精度的影响
引用本文:魏晓蓉,刘丰文.两种莫尔条纹信号对光栅系统测量精度的影响[J].光电工程,2002,29(6):43-45.
作者姓名:魏晓蓉  刘丰文
作者单位:中国科学院光电技术研究所,四川,成都,610209
摘    要:对两种莫尔条纹(光闸条纹和横向条纹)信号的谐波含量以及它们对光栅系统测量精度的影响进行了分析,并用实测数据加以比较,指出在光栅系统中,取横向莫尔条纹信号的谐波量小,正弦性好,细分误差小,在其它参数相同的情况下,可提高系统的测量精度2倍左右。

关 键 词:莫尔条纹信号  光栅系统  测量精度  谐波  测量误差
文章编号:1003-501X(2002)06-0043-03
收稿时间:2002/4/10
修稿时间:2002年4月10日

Influence of two Moire fringe signals on measuring accuracy of a grating system
WEI Xiao-rong,LIU Feng-wen.Influence of two Moire fringe signals on measuring accuracy of a grating system[J].Opto-Electronic Engineering,2002,29(6):43-45.
Authors:WEI Xiao-rong  LIU Feng-wen
Abstract:The harmonic wave content in two Moire fringes (light valve fringe and lateral fringe) and their influence on measuring accuracy of a grating system are analyzed, and a comparison is carried out with practical measured data. We always use lateral Moire fringe signal of the grating system. The signal has the advantages of small harmonic wave amount, good sine property and small subdivision error. The measuring accuracy of a system can be improved for 2 factors or so when the other parameters are same.
Keywords:Moire fringes  Grating system  Harmonic wave  Measuring accuracy
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