| 硅基二氧化硅阵列波导光栅相位误差数值分析 |
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| 引用本文： | 安俊明,夏君旨,李健,郜定山,李建光,王红杰,胡雄伟. 硅基二氧化硅阵列波导光栅相位误差数值分析[J]. 半导体学报, 2005, 26(13): 220-224 |
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| 作者姓名： | 安俊明 夏君旨 李健 郜定山 李建光 王红杰 胡雄伟 |
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| 作者单位： | 内蒙古大学物理系，呼和浩特 010021;中国科学院半导体研究所 光电子研究发展中心，北京 100083;唐山工业职业技术学院，唐山 063000;中国科学院半导体研究所 光电子研究发展中心，北京 100083;中国科学院半导体研究所 光电子研究发展中心，北京 100083;中国科学院半导体研究所 光电子研究发展中心，北京 100083;中国科学院半导体研究所 光电子研究发展中心，北京 100083;中国科学院半导体研究所 光电子研究发展中心，北京 100083 |
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| 摘 要： | 采用传输函数法对硅基二氧化硅阵列波导光栅(AWG)的相位系统误差和随机误差进行了详细的分析. 系统误差的模拟结果表明阵列波导的有效折射率和相邻阵列波导长度差ΔL的偏移将会对使中心波长λ0偏离设计值，平板波导有效折射率、阵列波导的间距、罗兰圆聚焦长度R的偏移会使通道间隔偏离设计值. 随机误差的模拟结果表明相邻阵列波导长度差、阵列波导中芯区折射率、芯区宽度、芯区厚度的随机波动对AWG的串扰影响较大，而波导上、下包层折射率的波动对AWG串扰影响较小.
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| 关 键 词： | 阵列波导光栅；串扰；相位误差；数值分析 |
Numerical Analysis for Phase Error of Silica-Based Arrayed Waveguide Grating |
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| An Junming,Xia Junzhi,Li Jian,Gao Dingshan,Li Jianguang,Wang Hongjie and Hu Xiongwei. Numerical Analysis for Phase Error of Silica-Based Arrayed Waveguide Grating[J]. Chinese Journal of Semiconductors, 2005, 26(13): 220-224 |
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| Authors: | An Junming Xia Junzhi Li Jian Gao Dingshan Li Jianguang Wang Hongjie Hu Xiongwei |
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| Affiliation: | Department of Physics,Inner Mongolian University,Hohhot 010021,China;;Tangshan Industrial Vocational Technology College,Tangshan 063000,China;R&D Center for Optoelectonics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;R&D Center for Optoelectonics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;R&D Center for Optoelectonics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;R&D Center for Optoelectonics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;R&D Center for Optoelectonics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China |
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| Abstract: | Phase systematical and random errors of silica-based AWG are analyzed in detail using transmission function method.The results of systematical error analysis show that the deviation from designed values of effective refraction index and path difference of arrayed waveguides makes central wavelength deviate from designed value,and the deviation of the effective refractive index of slab waveguides,the pitch of arrayed waveguides and the focal length makes channel spacing deviate from designed value.The results of random error analysis show that the fluctuation of path difference,core refractive index,width and height of core impacts on crosstalk more than that of undercladding and overcladding refractive index |
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| Keywords: | arrayed waveguide grating crosstalk phase error numerical analysis |
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