工业陶瓷超声辅助加工技术研究

陶瓷材料具有耐高温、硬度高、绝缘性好的优良性能，在航空航天、军事医疗、电子信息等领域具有广泛的应用。旋转超声辅助加工的刀具磨损小、材料去除率高、加工精度高，在工业陶瓷精密加工领域取得了较好的运用。本文以常用的石英陶瓷和氮化硅陶瓷为加工对象，进行了表面磨削及钻孔试验研究，通过宏观形貌观察、测量表面粗糙度值、工件及刀具微观形貌分析，确定了PCD砂轮结合超声辅助磨削加工，可以得到较好的表面加工质量。开展了石英陶瓷凹槽面、平面及过渡面的磨削加工试验，取得了较好的表面形貌；利用不同类型的砂轮加工氮化硅陶瓷孔，从而确定高强度的金刚石磨头是加工硬性材料的最优砂轮。

Research on Ultrasonic Assisted Machining Technology of Industrial Ceramics

Ceramic materials have excellent properties of high temperature resistance, high hardness, and good insulation. They are widely used in aerospace, military medical, electronic information and other fields. Rotary ultrasonic-assisted machining has small tool wear, high material removal rate, and high machining accuracy. It has been well used in the field of industrial ceramic precision machining. In this paper, the commonly used quartz ceramics and silicon nitride ceramics are used as the processing objects, and the surface grinding and drilling experiments are carried out. The PCD grinding wheel is determined through macroscopic morphology observation, surface roughness measurement, and microscopic morphology analysis of workpieces and tools. Combined with ultrasonic-assisted grinding processing, better surface processing quality can be obtained. Carried out the grinding processing test of quartz ceramic groove surface, plane and transition surface, and achieved good surface morphology; using different types of grinding wheels to process silicon nitride ceramic holes, so as to determine that the high-strength diamond grinding head is hard to process The best grinding wheel for the material.