| 微型笔直写技术制备厚膜温度传感器阵列研究 |
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| 引用本文： | 蔡志祥,李祥友,胡乾午,曾晓雁.微型笔直写技术制备厚膜温度传感器阵列研究[J].电子元件与材料,2008,27(9). |
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| 作者姓名： | 蔡志祥 李祥友 胡乾午 曾晓雁 |
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| 作者单位： | 华中科技大学,光电子科学与工程学院,武汉光电国家实验室(筹)激光部,湖北,武汉,430074 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，国家自然科学基金 |
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| 摘 要： | 利用微型笔直写技术,在Al2O3陶瓷基板上制备了4×4厚膜PTC热敏电阻温度传感器阵列。研究了驱动气压、笔嘴直径以及直写速度等对厚膜PTC热敏电阻线宽的影响,分析了微型笔直写PTC热敏电阻温度传感器的形成机理。目前微型笔在Al2O3陶瓷基板上直写的厚膜PTC热敏电阻线宽为130~400μm。高温烧结后其电阻温度系数αR为1620×10–6/℃,在25~95℃之间电阻阻值随温度的变化具有良好的线性。
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| 关 键 词： | 电子技术 微型笔 温度传感器阵列 直写技术 热敏电阻 |
Study on thick-film temperature sensor array fabricated by micropen direct-writing technology |
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| CAI Zhi-xiang,LI Xiang-you,HU Qian-wu,ZENG Xiao-yan.Study on thick-film temperature sensor array fabricated by micropen direct-writing technology[J].Electronic Components & Materials,2008,27(9). |
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| Authors: | CAI Zhi-xiang LI Xiang-you HU Qian-wu ZENG Xiao-yan |
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| Affiliation: | CAI Zhi-xiang,LI Xiang-you,HU Qian-wu,ZENG Xiao-yan (School of Optoelectronics Science , Engineering,Laser Division,Wuhan National Laboratory of Optoelectronics,Huazhong University of Science , Technology,Wuhan 430074,China) |
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| Abstract: | 4×4 thick-film PTC thermistor temperature sensor array on Al2O3 ceramic substrate was prepared using micropen direct-writing technique. The effects of driving gas pressure, the diameter of nozzle, and direct writing speed on thick-film PTC thermistor line width were studied systematically. And the mechanism of PTC thermistor temperature sensor formation was analyzed. Now, the line width of thick-film PTC thermistor on Al2O3 ceramic substrate by micropen direct writing is 130~400 μm. After sintering of high temperature, its αR is 1 620×10-6 / ℃, and the dependence of resistance versus temperature between 25 ℃ and 95 ℃ is good linearity. |
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| Keywords: | electron technology micropen temperature sensor array direct-writing technique thermistor |
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