一种电容式加速度传感器设计的研究

设计了一种惯性式测振传感器,建立了差动电容式加速度传感器的数学模型,并对其作了特性分析,由给定的非线性误差可以求出质量块相对运动的最大量程.本设计具有电路结构简单,频率范围宽约为0～450HZ,线性度小于1%,灵敏度高,输出稳定,测量误差小等优点,并且通过实验验证了各项性能指标满足设计要求.

Study of Capacitive Acceleration Transducer Design

The paper designs a inertial vibration sensors. The mathematic model of a differential capacitive acceleration sensor was built up and its characteristic analysis was discussed. The maximal measuring range of bulk masses relatively moving can be gained by non-linear error. The design has many excellences, such as simple circuit constitution, 0~450HZ frequency range, less than 1 percent linearity, high sensitive ability, stability output, little measuring error. Every capability index was examined by experiments and all satisfy the design requirements.