| 钼基体上真空等离子体喷涂钨涂层的研究 |
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| 引用本文： | 邝子奇,代明江,熊国刚,刘敏,邓畅光,周克崧. 钼基体上真空等离子体喷涂钨涂层的研究[J]. 真空科学与技术学报, 2005, 25(5): 381-384 |
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| 作者姓名： | 邝子奇 代明江 熊国刚 刘敏 邓畅光 周克崧 |
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| 作者单位： | 1. 广州有色金属研究院,广州,510651
2. 中国工程物理研究院机械制造工艺研究所,绵阳,621900 |
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| 摘 要： | 采用真空等离子体喷涂(VPS)技术制备出厚度超过0.8 mm的金属钨涂层,并对涂层进行了高温热处理.结果显示:金属钨涂层主要呈层状结构,其密度可达到理论密度的98%以上;工艺参数对喷涂涂层性能有较大影响,特别是对涂层密度、结合强度有影响;高温热处理引起界面结构变化,形成钨钼混合层,且再结晶形成细小的晶粒;和CVD方法以及常压等离子体喷涂方法制备的钨涂层相比,低压等离子体喷涂具有明显的优势.
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| 关 键 词： | 真空等离子体喷涂 钨涂层 高温热处理 钼基体 |
| 文章编号： | 1672-7126（2005）05-0381-04 |
| 收稿时间： | 2004-12-30 |
| 修稿时间： | 2004-12-30 |
Tungsten Coating on Mo Substrate by Vacuum Plasma Spray |
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| Kuang Ziqi,Dai Mingjiang,Xiong Guogang,Liu Min,Deng Changguang,Zhou Kesong. Tungsten Coating on Mo Substrate by Vacuum Plasma Spray[J]. JOurnal of Vacuum Science and Technology, 2005, 25(5): 381-384 |
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| Authors: | Kuang Ziqi Dai Mingjiang Xiong Guogang Liu Min Deng Changguang Zhou Kesong |
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| Affiliation: | 1. Guangzhou Research Institute of Non-ferrous Metals, Guangzhou,510651, China ; 2. Mechanic Manufacture Process Institute of China Academic Engineering Physics,Mianyang,621900, China |
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| Abstract: | Thick tungsten films were coated on molybdenum substrate by vacuum plasma spray and annealed in-situ at different high temperatures.The W coatings were characterized with X-ray diffraction(XRD) and scanning electron microscopy(SEM).The results show that the W coating has a compact,layered structure with a density close to 98% of the theoretical prediction.We found coating conditions strongly affect its properties,such as its grain size,its compactness and its interfacial adhesion.For instance,high annealing temperature results in formation of fine grains and inter-diffusion at the W/Mo interface.The technical advantages of vacuum plasma spray over conventional chemical vapor deposition(CVD) and air plasma spray in tungsten coating were also discussed. |
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| Keywords: | Vacuum plasma spray W coating High temperature treatment Mo substrate |
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