|
|||||
|
|
Molecular dynamics study of deposition mechanism of cubic boron nitride |
|
| Authors: | H Koga Y Nakamura Masahiko Watanabe T Yoshida |
| Affiliation: | 1. Department of Metallurgy and Materials Science, Graduate School of Engineering, The University of Tokyo, 7-3-1 HOngo, Bunkyo-ku, Tokyo, 113-8656, Japankoga@cello.mm.t.u-tokyo.ac.jp;3. Department of Metallurgy and Materials Science, Graduate School of Engineering, The University of Tokyo, 7-3-1 HOngo, Bunkyo-ku, Tokyo, 113-8656, Japan;4. Core Research for Evolutional Science and Technology (CREST), Japan Science and Technology Corporation, Japan;5. Core Research for Evolutional Science and Technology (CREST), Japan Science and Technology Corporation, Japan |
| Abstract: | We have performed molecular dynamics simulations of bombardment of graphitic boron nitride (gBN) by energetic boron and nitrogen particles in order to examine the roles of ion bombardment in ion/plasma-assisted deposition of cubic boron nitride (cBN) thin films. We have found that the interaction of the energetic particles with gBN creates four-fold coordinated local structures (sp3-formation) inside gBN. We have also found that clusters of sp3-formations are created as a result of successive bombardment, some of which have cBN-like structures. On the basis of these results, we propose an atomic-scale model of cBN nucleation in which successive sp3-formation converts gBN into cBN. |
| Keywords: | Molecular dynamics Growth models Nucleation Thin films lon bombardment Defects Cubic boron nitride Rhombohedral boron nitride Hexagonal boron nitride |