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Simple method to determine linearity deviations of topography measuring instruments with a large range axial scanning system |
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| Affiliation: | 1. Member of Flanders Make - Core Lab MaPS, KU Leuven, Celestijnenlaan 300, 3001, Leuven, Belgium;2. Manufacturing Metrology Section, MaPS, KU Leuven, Celestijnenlaan 300, 3001, Leuven, Belgium;1. Worcester Polytechnic Institute, USA;2. Technical University of Denmark, Denmark;3. University of Huddersfield, UK;4. Digital Surf, France;5. Swerea IVF, Sweden;6. Chalmers University of Technology, Sweden;7. University of Nottingham, UK;8. University of Perugia, Italy;9. Poznan University of Technology, Poland;10. University of South Florida, USA;11. Le2i, Université de Bourgogne, France;12. LURPA, ENS Paris Saclay, France;13. Keene State College, USA;14. GE Additive, USA;15. University of Arkansas, USA;p. Ecole Nationale d’Ingénieurs de Saint-Etienne, LTDS, France |
| Abstract: | The use of areal characterization of surface texture with high accuracy in a quality control process requires reliability. Therefore, regular inspection of the measurement systems is needed. Important metrological features of a measurement system in dimensional metrology are the amplification factor and linearity.This paper presents a simple method for characterizing the axial scanning system of areal topography measuring instruments with little expense and effort, well suited for industrial routine calibration in the field. The method is based on employing a single material measure with a range of step heights. It is shown that the amplification factor and linearity deviations can be determined and adjusted for large axial measurement ranges. |
| Keywords: | Surface topography Topography measurement Amplification factor Linearity Calibration Step height standards Uncertainty Large range axial scanning |
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