| 液晶面板洁净室内工艺设备对气流影响和调整研究 |
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| 引用本文： | 王全军.液晶面板洁净室内工艺设备对气流影响和调整研究[J].洁净与空调技术,2013(3):61-63. |
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| 作者姓名： | 王全军 |
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| 作者单位： | 北京京东方光电科技有限公司 |
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| 摘 要： | 针对单向垂直流洁净室内，受工艺设备影响导致的气流偏移、无效气流现象进行综合分析，探讨在洁净室设计和施工过程中所要考虑的因素以及运行阶段气流二次调整的方案，使洁净室形成良好的气流流型，并能更好地满足实际生产的需要。
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| 关 键 词： | 洁净室 气流组织 工艺设备 调整 微环境 |
Airflow Problem Caused by Process Equipment and Adjustment Plan for TFT-LCD Cleanroom |
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| Wang Quanjun.Airflow Problem Caused by Process Equipment and Adjustment Plan for TFT-LCD Cleanroom[J].Contamination Control & Air-Conditioning Technology,2013(3):61-63. |
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| Authors: | Wang Quanjun |
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| Affiliation: | Wang Quanjun; |
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| Abstract: | An analysis of unidirectional Vertical airflow in cleanroom was made, which can skew random and blow unefficiently by the influence of process equipment. Discussed the major issues that should be considered in the cleartroom design and Construction phase and adjustment plans of airflow in cleanroom operation phase, so that airflow could meet the production requirement. |
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| Keywords: | Clean room Air flow Process equipment Adjustment Mini-environment |
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