Thermal stability of metal-doped diamond-like carbon fabricated by dual plasma deposition |
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| Affiliation: | 1. Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, PR China;2. University of Chinese Academy of Sciences, Beijing 100049, PR China;1. Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China;2. Gao Hong Coating Technology Co., Ltd, Huzhou 313000, China;1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Japan;2. Faculty of Engineering, Kobe University, Japan |
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| Abstract: | Metal incorporation into amorphous diamond-like carbon films can provide superior properties as metal nano-clusters or nanocrystalline metallic carbides can be embedded in the carbon network. In this work, a filtered metal plasma cathodic arc technique is used to generate a metal plasma and acetylene is introduced to the metal plasma plume to deposit metal-containing DLC (Me-DLC) films and form nanocrystalline carbide phases in the amorphous carbon matrix. The films exhibit high thermal stability up to annealing temperatures of 500 °C as revealed by X-ray diffraction, transmission electron microscopy, and Raman spectroscopy. At treatment temperature over 500 °C, a large amount of hydrogen is lost from the Me-DLC films as shown by elastic recoil detection. Breakdown and structural collapse of the film at high temperature can be attributed to the breaking of C–H bonds. Consequently, the C–C networks become more graphite-like to facilitate the formation of volatile C–O and metal oxides phases. |
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