The influence of dark feature on optical and thermal property of DC Arc Plasma Jet CVD diamond films |
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| Affiliation: | 1. Research Institute of Surface Engineering, Taiyuan University of Technology, Taiyuan 030024, China;2. The Ningbo Branch of Ordnance Science Institute of China, Ningbo 315103, China;3. School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China;1. IRTES-LERMPS, UTBM, site de Sevenans, 90010 Belfort cedex, France;2. CEA Le Ripault, 37260 Monts, France;1. School of Material Science and Engineering, University of Science and Technology Beijing, Beijing 100083, PR China;2. College of Materials Science and Opto-Electronic Technology, Graduate University of Chinese Academy of Sciences, Beijing 100049, PR China |
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| Abstract: | Different grades of CVD diamond films were prepared by 100 kW DC Arc Plasma Jet system. The films were characterized using optical microscope (OM), high-resolution transmission electron microscopy (HRTEM), electron energy-loss spectroscopy (EELS), and Raman spectroscopy. The results show that dark feature mainly is inclusions in CVD diamond films, the concentration are amorphous carbon and nitrogen. As for transparent optical grade diamond film, it has very high IR transparency and high thermal conductivity. The appearance of dark feature degraded the quality of CVD diamond film, apparently influencing IR transparency and thermal conductivity. But even in optical grade diamond film, there are very strong absorption features in the 7–9 μm region, this will limit the practical applications of diamond films grown by Plasma Jet as IR windows for CO2 lasers. |
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