Influence of thermal annealing on optical properties and structure of aluminium oxide thin films by filtered cathodic vacuum arc |
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| Affiliation: | 1. School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore;2. School of Mechanical Processing Engineering, Nanyang Technological University, Singapore 639798, Singapore;1. Department of Urology, Tulane University School of Medicine, New Orleans, LA, USA;2. Department of Natural Sciences, Southern University at New Orleans, New Orleans, LA, USA;3. Department of Biochemical Engineering, Tulane University, New Orleans, LA, USA;4. Division of Comparative Pathology, Tulane National Primate Research Center, Covington, LA, USA;1. OSRAM Opto Semiconductors GmbH, Leibnizstr. 4, 93055 Regensburg, Germany;2. ISOM and Departamento Ingeniería Electrónica, ETSI Telecomunicación, Universidad Politécnica de Madrid, 28040 Madrid, Spain;3. Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany;1. Signal and Information Processing, Department of Electronic Systems, Aalborg University, Denmark;2. Center for Dynamical Systems Signal Processing and Data Analytics (STADIUS), Department of Electrical Engineering (ESAT), KU Leuven, Belgium;3. Audio Analysis Lab, AD:MT, Aalborg University, Denmark;1. Institute of Science, R.T. Road, Civil Lines, Nagpur, India;2. Radiological Physics and Advisory Division, Bhabha Atomic Research Centre, Mumbai, India;3. Ex-D.S.T Fellow, C/o RPAD, BARC, Mumbai, India;4. R.T.M. Nagpur University, Nagpur, India;1. Department of Radiology and Center for Imaging Science, Samsung Medical Center, Sungkyunkwan University School of Medicine, Seoul 135-710, Republic of Korea;2. Department of Pathology, Samsung Medical Center, Sungkyunkwan University School of Medicine, Seoul 135-710, Republic of Korea;3. Division of Oncology, Department of Medicine, Samsung Medical Center, Sungkyunkwan University School of Medicine, Seoul 135-710, Republic of Korea;4. Biostatics Unit, Samsung Biomedical Research Institute, Samsung Medical Center, Seoul 135-710, Republic of Korea |
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| Abstract: | Optical and structural properties of aluminium oxide thin films are investigated in the annealing temperature range of 200–900 °C. The changes in optical properties and film structure show the great dependence on the temperature. For the film annealed at low temperatures (from 200 °C to 600 °C), the film optical properties, such as transmittance and optical constants, could be improved by thermal annealing with amorphous structure and smooth surface. However, for the film annealed at higher temperature (e.g. 900 °C), the poor performance of optical properties indicates undesirable application for precise use in optics due to significant changes in both structure and surface roughness. At optimum annealing temperature of 600 °C, the transmittance could reach as high as that of substrate and the film possesses better optical constants (refractive index was 1.73 and extinction coefficient was ∼10−4 at 550 nm) with remaining amorphous structure and smooth surface. |
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