Effect of plasma conditions on fabrication of multi-walled carbon nanotubes grown perpendicularly on Hastelloy C276® |
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| Affiliation: | 1. Nanoarchitectonics Research Center (NARC), National Institute of Advanced Industrial Science and Technology (AIST), Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan;2. Department of Advanced Material Science, Graduate School of Frontier Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 227-8562, Japan;1. Nanomaterials Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, 305-8565, Japan;2. Molecular Chirality Research Center, Graduate School of Advanced Integration Science, Chiba University, Matsudo, Chiba 271-8510, Japan;3. Fluidware Technologies, 1-21-7 Kasukabe-Higashi, Kasukabe, Saitama 344-0062, Japan;4. Regeneration and Advanced Medical Science, Gifu University Graduate School of Medicine, 1-1 Yanagido, Gifu 501-1194, Japan;5. National Research Institute of Police Science, 6-3-1 Kashiwanoha, Kashiwa, Chiba 277-0882, Japan;1. Department of Earth and Environmental Science, Ludwig-Maximilians University, Munich D-80333, Germany;2. GNS Science, PO Box 30368, Lower Hutt 5040, New Zealand;3. Scripps Institution of Oceanography, UCSD, 9500 Gilman Drive, La Jolla, CA 92093-0220, USA;4. School of Geography, Environment and Earth Sciences, Victoria University of Wellington, PO Box 600, Wellington 6140, New Zealand;1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, 3 Acad. Lavrentiev Ave., 630090 Novosibirsk, Russia;2. Novosibirsk State University, 2 Pirogova Str., 630090 Novosibirsk, Russia;3. State Key Laboratory of Chemical Resource Engineering, Beijing Key Laboratory of Electrochemical Process and Technology for Materials, Beijing University of Chemical Technology, Beijing 100029, PR China;1. Beijing Institute of Technology, 5 South Zhongguancun Street, Haidian District, Beijing, 100081, China;2. National Institute of Advanced Industrial Science and Technology, 1-1-1Higashi, Tsukuba, Ibaraki, 305-8565, Japan |
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| Abstract: | We prepared multi-walled carbon nanotubes (MWCNTs) on Hastelloy C276® by a direct current (dc) plasma-assisted hot filament chemical vapor deposition in CH4/N2 atmosphere. Two-step deposition method, consisting of nucleation step and the subsequent CNT growth step, was employed and MWCNTs were grown by the catalytic growth with metal particles, which were precipitated from Hastelloy C276® and mainly consisted of Ni. The plasma generated at the current density of 30 mA/cm2 was necessary to form nuclei for CNT growth, while the reducing of the plasma current density to the range between 10 and 20 mA/cm2 was needed to grow MWCNTs. Based on these results, we proposed the possible mechanisms of the nucleus formation and MWCNT growth. |
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