微操作中力的检测及控制

微操作过程中,操作对象的特征尺寸通常小于1 mm。由于尺度效应和表面效应,操作对象本身的重力和惯性力不再起主导作用,粘附力作用成为影响微操作成败的关键因素。这就导致了单靠宏观上的操作技术不能充分解决微观领域操作问题。该文在论述微操作过程中粘附力作用机理的基础上给出了一些微操作过程中有关力的检测、控制的可行方法。

Force Sensing and Control in Micro-manipulation

In micromanipulation,the size of the manipulated object is usually much less than one millimeter in a single dimension,in which case those gravitational and inertial forces are no longer dominant and adhesion force between the tip of manipulator and the micro object becomes the key factor to affect micromanipulation dues to scale effect and surface effect.This leads to problems which are not evident in macro-world,and for which macro-world techniques alone may not be adequate to provide solutions.In this paper,adhesion force active mechanism during the process of the micromanipulation is presented,then base on which some effective methods related to force sensing and control are proposed in micromanipulation.