| 9Cr18钢上离子束辅助沉积TiCxNy膜的研究 |
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| 引用本文： | 王培录,孙官清,刘仲阳,郑思孝,廖小东. 9Cr18钢上离子束辅助沉积TiCxNy膜的研究[J]. 核技术, 1999, 22(1): 6-10 |
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| 作者姓名： | 王培录 孙官清 刘仲阳 郑思孝 廖小东 |
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| 作者单位： | 四川联合大学原子核科学技术研究所,辐射物理与技术国家教委开放实验室,成都,610064 |
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| 摘 要： | 用离子束辅助沉积技术９Ｃｒ１８钢基体上形成了ＴｉＣｘＮｙ膜,ＴＥＭ观察膜呈多晶结构,具有（１１１）,（２００）和（２２０）择优取向。ＡＥＳ和ＸＰＳ分析进一步证实,ＴｉＣｘＮｙ膜呈含氧配置。膜的硬度与Ｎ含量有关,Ｎ的含量过高时硬度下降。在本实验条件下以离子注量为３×１０＾１７／ｃｍ６２时硬度最高,干摩擦表明膜的抗氧化性能优良,它的存在能有效抑制基体在摩擦过程中氧化皮的形成,显改善基体的磨损特性,并
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| 关 键 词： | 离子束辅助沉积 氮碳化钛 摩擦 粘着磨损 磨粒磨损 |
Study of TiCxNy films formed by ion beam assisted deposition on 9Cr18 steel |
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| WANG Peilu,SUN Guanqing,LIU Zhongyang,ZHENG Sixiao,LIAO Xiaodong. Study of TiCxNy films formed by ion beam assisted deposition on 9Cr18 steel[J]. Nuclear Techniques, 1999, 22(1): 6-10 |
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| Authors: | WANG Peilu SUN Guanqing LIU Zhongyang ZHENG Sixiao LIAO Xiaodong |
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| Abstract: | The TiCxNy films were formed on 9Cr18 steel matrix using the ion beam assisteddeposition. The TEM analysis revealed the films with a polycrystalline structure with(111), (200) and (220) preferred orientation. The fact that TiCxNy films contain oxygencoordination was further confirmed by AES and XPS. Microhardness of the films wasfound dependent on its N content, and it was decreased for an excessively high Ncontent. An assisted dose of 3 X 1017/cm2 is optimum in this experiment. A dry frictiontest indicated that oxidation resistance of the films is excellent, and oxidation of thesteel matrix in the friction process can be obviously inhibited. Both the abrasive andadhesive wears of matrix are improved, and a trend of transformation from adhesiveinto abrasive wear appears for the steel matrix. |
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| Keywords: | Ion beam assisted deposition Titanium carbonitride Friction Adhesivewear Abrasive wear |
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