| 碳纳米管在微机电系统(MEMS)中的应用研究 |
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| 引用本文： | 叶雄英,郭琳瑞,周兆英.碳纳米管在微机电系统(MEMS)中的应用研究[J].微细加工技术,2004(1):9-17. |
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| 作者姓名： | 叶雄英 郭琳瑞 周兆英 |
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| 作者单位： | 清华大学,精密仪器及机械学系,北京,100084 |
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| 基金项目： | 高等学校博士学科点专项科研基金资助项目(2002003018) |
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| 摘 要： | 碳纳米管研究的不断发展为其与微机电系统(MEMS)的结合提供了可能,这种结合“Top—down”与“Bottom—up”的方法是微米／纳米技术的一个发展趋势。介绍了碳纳米管的特性及其在MEMS上的潜在应用,综述了碳纳米管的制备方法以及与MEMS技术的兼容性,列举了目前一些碳纳米管与MEMS结合研究的典型,并对其发展趋势进行了分析。
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| 关 键 词： | 碳纳米管 微机电系统 MEMS 纳机电系统 磁学性能 制备方法 |
| 文章编号： | 1003-8213(2004)01-0009-09 |
Research on Carbon Nanotubes in Micro Electro-mechanical System and Its Application |
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| YE Xiong-ying,GUO Lin-rui,ZHOU Zhao-ying.Research on Carbon Nanotubes in Micro Electro-mechanical System and Its Application[J].Microfabrication Technology,2004(1):9-17. |
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| Authors: | YE Xiong-ying GUO Lin-rui ZHOU Zhao-ying |
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| Abstract: | The research progress of carbon nanotubes offers a wide range of possibilities for the combination of carbon nanotubes and MEMS. The method combining both"Top-down"and"Bottom-up"is the trend of micro-nano technology.The basic characteristics of carbon nanotubes and their potential applications to MEMS are introduced. The fabricating technology of the carbon nanotubes and their compatibility with MEMS are summarized.The examples for the current research combining the carbon nanotubes with MEMS are given, and its developing trend is also analyzed. |
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| Keywords: | MEMS carbon nanotubes NEMS |
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