X-ray irradiation of ion-implanted MOS capacitors

He⁺ ion-implanted metal-oxide-semiconductor (MOS) capacitors with two different oxide thickness have been irradiated by X-rays and the depth distribution of the implant damage in the Si–SiO₂ structures have been examined. The efficiency of X-ray annealing of electronic traps caused by implantation and changes in charge populations are reported. The experiment shows that (in the case when defects introduced by implantation are located at the Si–SiO₂ interface) only defects corresponding to the deep levels in the Si can be affected by X-ray irradiation. When defects introduced by ion implantation are located deeper within the Si substrate complete annealing of these defects is observed.