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沉积态(Fe88Zr7B5)0.97Cu0.03软磁合金薄膜的磁性和巨磁阻抗效应
引用本文:陈卫平,萧淑琴,王文静,刘宜华.沉积态(Fe88Zr7B5)0.97Cu0.03软磁合金薄膜的磁性和巨磁阻抗效应[J].金属学报,2004,40(12):1295-1298.
作者姓名:陈卫平  萧淑琴  王文静  刘宜华
作者单位:1. 浙江台州学院物理系,临海,317000
2. 山东大学物理与微电子学院,济南,250100
基金项目:山东省优秀中青年科学家科研奖励基金和山东大学青年基金资助项目
摘    要:采用射频溅射法在单晶硅衬底上制备了(Fe88Zr7B5)0.97Cu0.03非晶软磁合金薄膜样品,对沉积态样品的软磁性能和巨磁阻抗(GMI)效应进行了实验研究与机理分析.结果表明,未掺Cu元素的Fe88Zr7B5沉积态合金薄膜几乎无GMI效应,而掺了适量Cu元素的(Fe88Zr7B5)0.97Cu0.03合金薄膜在沉积态下即具有显著的GMI效应.在13MHz频率下,最大纵向磁阻抗比达17%,最大横向磁阻抗比为11%,这表明(Fe88Zr7B5)0.97Cu0.03非晶合金薄膜在沉积态已具备优异的软磁性能和巨磁阻抗效应.同时讨论了该薄膜样品的巨磁阻抗效应随频率的变化特性.

关 键 词:Fe-Zr—B—Cu非晶薄膜  软磁性能  趋肤效应  巨磁阻抗效应
文章编号:0412-1961(2004)12-1295-04
收稿时间:2004-01-06
修稿时间:2004-04-14

MAGNETIC PROPERTIES AND GIANT MAGNETOIM-PEDANCE EFFECT IN AS DEPOSITED (Fe88Zr7B5)0.97Cu0.03 FILMS
CHEN Weiping,XIAO Shuqin,WANG Wenjing,LIU Yihua.MAGNETIC PROPERTIES AND GIANT MAGNETOIM-PEDANCE EFFECT IN AS DEPOSITED (Fe88Zr7B5)0.97Cu0.03 FILMS[J].Acta Metallurgica Sinica,2004,40(12):1295-1298.
Authors:CHEN Weiping  XIAO Shuqin  WANG Wenjing  LIU Yihua
Affiliation:Department of Physics, Zhejiang Taizhou College, Linhai 317000
Abstract:The soft magnetic properties and giant magnetoimpedance (GMI) effect of the amorphous films of Fe88Zr7B5 and (Fe88Zr7B5)0.97Cu0.03 prepared by radio frequency sputtering on the substrate of single crystal Si have been measured. Significant results obtained is that the GMI effect almost can not be detected in the as-deposited Fe88Zr7B5 films, while it becomes evident for as-deposited (Fe88Zr7B5)0.97Cu0.03 films. The maximum values of longitudinal and transverse GMI ratio are 17% and 11% at the frequency of 13 MHz, respectively, indicating that the amorphous (Fe88Zr7B5)0.97Cu0.03 films have good soft magnetic properties and GMI effect even though in the as-deposited state.
Keywords:amorphous Fe-Zr-B-Cu film  soft magnetic property  skin effect  giant magnetoimpedance (GMI) effect
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