基于频闪法的MEMS动静态测试系统

为了对MEMS器件的3D形貌、垂向位移与形变、共振频率等特性进行精确的非接触式的测量,研制了一种基于激光频闪法的MEMS动静态测试系统.该系统以改进了的泰曼干涉仪为核心,采用激光照明,结合五步相移算法,获得MEMS器件静态表面的3D形貌图.使激光频闪的频率与MEMS器件驱动信号源频率一致可以获得相对"冻结"不变的3D形貌.改变频闪激光相对于MEMS器件驱动信号源的相对相位延时,可以获得周期内的MEMS器件离面运动轨迹等参数.本文设计并实现了与该系统配套的数据处理软件.该系统对于离面运动的测量精度可达1nm,最高测试频率可达500kHz.通过对可变形反射镜的测试验证了该系统的可靠性与通用性.

Measurement system for static and dynamic characterization of MEMS based on stroboscopic imaging

In order to measure surface shape, resonance frequency, out-of-plane motion and deformation of microstructures, a measurement system for static and dynamic characterization of MEMS was developed based on stroboscopic imaging and microscope interferometry. By means of improved Twyman-Green interferometer cooperated five-step phase-shift algorithm, the surface shape of the sample was acquired. By adjusting the relative time of the laser pulse train and drive waveform, dynamic characterization of MEMS sample in the periods was obtained. A new software matching the hardware was designed and implemented. The out-of-plane displacement resolution of the system can reach Into and the highest measurement frequency can reach 500kHz. The test of the static and dynamic characterization of deformable mirror verifies the practicability and reliability of the system.