| 离子束溅射制备Co／Pt多层膜的结构 |
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| 引用本文： | 吴隽.离子束溅射制备Co／Pt多层膜的结构[J].贵金属,1998,19(3):10-15. |
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| 作者姓名： | 吴隽 |
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| 作者单位： | 贵金属研究所 |
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| 摘 要： | 采用高角Ｘ射线衍射（ＨＸＲＤ）和ＴＥＭ研究用离子束溅射（ＩＢＳＤ）技术制备的Ｃｏ／Ｐｔ多层膜的晶体结构和显微组织形貌，结果表明：Ｃｏ／Ｐｔ多层膜的晶体结构与Ｃｏ、Ｐｔ层厚度ｔＣｏ、ｔＰｔ密切相关。当ｔＣｏ＜ｔＰｔ＜２１０时，Ｃｏ、Ｐｔ层为共格ｆｃｃ结构，随ｔＣｏ、ｔＰｔ增加，逐渐向非共格关系转变，同时，Ｐｔ、Ｃｏ层晶格发生了严重畸变。ＴＥＭ发现Ｃｏ／Ｐｔ多层膜的组织形貌明显受基底影响，与沉积在Ｓｉ基底表面上的Ｃｏ／Ｐｔ多层膜相比，沉积在ＮａＣｌ上的Ｃｏ／Ｐｔ多层膜的晶粒出现择优取向且呈条纹状分布，晶粒明显粗化
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| 关 键 词： | Co／Pt多层膜，晶体结构，组织形貌，畸变 |
Structure of Co/Pt Multilayers Prepared by Ion Beam Sputtering Deposition |
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| Wu Jun,Zhang Yongli.Structure of Co/Pt Multilayers Prepared by Ion Beam Sputtering Deposition[J].Precious Metals,1998,19(3):10-15. |
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| Authors: | Wu Jun Zhang Yongli |
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| Abstract: | The crystal structure and the morphologies of Co/Pt multilayers(MLs) prepared by IBSD have been studied by HXRD and TEM. The results showed that the crystal structure of Co/Pt MLs was in close relationship with t Co and t Pt . When t Co
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| Keywords: | Co/Pt multilayers Crystal structure Morphologies Deformations |
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