| 位相板在大型几何量形位误差测量中的应用 |
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| 引用本文： | 郝群. 位相板在大型几何量形位误差测量中的应用[J]. 光学精密工程, 1998, 6(4): 118-122 |
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| 作者姓名： | 郝群 |
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| 作者单位： | 清华大学精仪系 |
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| 摘 要： | 介绍了利用位相板技术进行准直的工作原理和特点,以及如何利用该项技术有效地确定激光准直光束的几何基准,并介始了以此技术为基础的光学基准在大型几何量形位误差测量中的应用。
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| 关 键 词： | 位相板 形位误差 大尺寸测量 |
| 收稿时间： | 1998-01-04 |
| 修稿时间： | 1998-04-06 |
Application of Phase Plate in Measuring Large Scale Form and Position Errors |
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| HAO Qun,ZHAO Yang,LI Da Cheng,CAO Mang. Application of Phase Plate in Measuring Large Scale Form and Position Errors[J]. Optics and Precision Engineering, 1998, 6(4): 118-122 |
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| Authors: | HAO Qun ZHAO Yang LI Da Cheng CAO Mang |
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| Affiliation: | State Key Laboratory of Precision Measurement Technology and Instrument, Tsinghua University, Beijing 100084 |
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| Abstract: | In this paper,principle and characteristics of the alignement technique with phase plate are described.By using the technique,the geometric datum of the alligned beam is dertermined effectively.Also in the paper,some applications of the technique in measuring large scale form and position errors are introduced. |
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| Keywords: | Phase plate Form and position error Large scale measurement |
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