| 浅析磁控溅射氧化锡镀膜工艺 |
| |
| 引用本文： | 郭明,杨建社. 浅析磁控溅射氧化锡镀膜工艺[J]. 玻璃, 2013, 40(2): 27-33 |
| |
| 作者姓名： | 郭明 杨建社 |
| |
| 作者单位： | 金堆城洛阳节能玻璃有限公司 洛阳市471202 |
| |
| 摘 要： | 通过对磁控溅射氧化锡镀膜工艺的研究,指出在不同溅射功率、不同工艺气体流量下,如何稳定、高效地控制氧化锡磁控溅射镀膜工艺。
|
| 关 键 词： | 磁控溅射 氧化锡 气体流量 阴极电压 |
Analysis of Tin Oxide Coating Process with Magnetron Sputtering |
| |
| Guo Ming , Yang Jianshe. Analysis of Tin Oxide Coating Process with Magnetron Sputtering[J]. Class, 2013, 40(2): 27-33 |
| |
| Authors: | Guo Ming Yang Jianshe |
| |
| Affiliation: | (Jin-dui-cheng (Luo-yang) energy-saving glass Co., Ltd., Luo-yang , 471202 ) |
| |
| Abstract: | This article discussed the tin oxide coating technique with magnetron sputtering process in order to make the process steadiness and high efficiency under different sputtering power and gas flow rate through the research on tin oxide coating technology. |
| |
| Keywords: | magnetron sputtering tin oxide gas flow cathode voltage |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
